Interchangeable sample stage with integral reference surface for magnetic-head suspension measuring instrument
US5813809A
Polymeric insert with crush-formed threads for mating with threaded surface
US5978086A
Method and apparatus for correcting shifts between a reference focal point and a reference surface as a result of thermal effects in an interferometric optical objective
US5822136A
Friction connector for optical flats in interferometers
US5987189A
Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map
US5726754A
Variable-speed scanning for interferometric measurements
US5689337A
Coaxial disc-mount for measuring flatness of computer-drive discs by interferometry
US5680214A
Horizontal-post/vertical-flexure arrangement for supporting large reference optics in phase-shifting scanning
US5640270A
Orthogonal-scanning microscope objective for vertical-scanning and phase-shifting interferometry
US5602643A
Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
US5555471A
Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry
US5633715A
Centroid approach for estimating modulation peak in broad-bandwidth interferometry
US5502566A
Method and apparatus for absolute optical measurement of entire surfaces of flats
US5717782A
Method and apparatus for restoring digitized video pictures generated by an optical surface-height profiler
US5471303A
Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
US5446547A
Combination of motorized and piezoelectric translation for long-range vertical scanning interferometry
US5452088A
Multimode-laser interferometric apparatus for eliminating background interference fringes from thin-plate measurements
US5483064A
Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy
US5398112A
Method for testing an optical window with a small wedge angle
