KR20150129292A
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Thin Film Transistor and Plat Display Device Having the same
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KR20150111308A
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Apparatus for Heat Treatment of Thin Film Electrode and Method for Heat Treat Using the Same
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KR20160083475A
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Heating module and thermal processing device having the same
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KR20160083450A
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Thermal processing system
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KR20160083482A
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Substrate thermal processing device with dual chamber
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KR20160083484A
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Recirculation Cooling Unit and Heat Treatment Apparatus Having the Same
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KR20160083434A
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Cantilever system
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KR20160083404A
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Tray Capable of Stacking of Substrate in Multiple Layers and Inline Heat Treatment Apparatus having the Same
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KR20160082851A
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Gas Intake and Exhaust System for Heat Treatment of Substrate
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KR20160082832A
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Recirculation Cooling Unit and Heat Treatment Apparatus Having the Same
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KR20160082830A
|
|
Planar heater device for thermal process of substrate
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KR20160079385A
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Substrate thermal processing system having cooling section
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KR20160079389A
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Batch Type Inline Heat Treatment Apparatus
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KR20160079383A
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Apparatus for Heat Treatment of Coating Layer having Multiple Heat Source and Method for Heat Treat Using the Same
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KR20160079202A
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Substrate thermal processing system having oxidation prevention section
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KR101479925B1
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Plane Heater for Heat Treatment Apparatus of Substrate
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KR20140136541A
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Transportation Module of Glass Substrate
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KR20140131738A
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Reflect Shutter and Heat Treatment Apparatus Having The Same and Heat Treatment Method Using the Same
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KR101136892B1
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Ceramic plate heater for semiconductor and display device manufacturing process
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KR20120116683A
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Apparatus for atmospheric pressure chemical vapor deposition
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