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Substrate thermal processing Apparatus
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Heat-Treatment Apparatus and Method of Substrate using VCSEL
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Lift-Off Apparatus Using Flash Lamp and Lift-Off Method Using the Same
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Heat Treatment Apparatus having Multi Slot
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Thermal processing system having recirculation cooling unit
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Thermal processing system having loadlock system
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Ceramic heater module for thermal process of substrate
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Airing Module for Process Chamber
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Heat Treatment Apparatus for uniform cooling of Substrate
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