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DE102019008785A1
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Power converter unit, power converter, circuit card and circuit card arrangement and use thereof
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Printed circuit board, transformer and array having a printed circuit board or transformer
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Directional coupler
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Process for compensating for process fluctuations in a plasma process and controller for a power generator for supplying a plasma process
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DE102018116637A1
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Power supply facility and operating procedures therefor
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Arc extinguishing process and power converter
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Printed circuit board, transformer and arrangement with a printed circuit board or transformer
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Apparatus and method for determining an electrical power reflected from a plasma
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RF power measurement device
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DE102018204587A1
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Method for igniting a plasma in a plasma chamber and ignition circuit
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DE102018204588A1
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Arrangement for cooling components and use of an electrolyte of an electrochemical storage as a coolant in such an arrangement
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DE102017218225A1
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cooling unit
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DE102017208917A1
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High-frequency amplifier arrangement and method for designing a high-frequency amplifier arrangement
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Power converter unit, plasma processing equipment and method of controlling several plasma processes
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Power converter unit, plasma processing equipment and method of controlling several plasma processes
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Power converter unit, plasma processing equipment and method of controlling several plasma processes
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DE102017206132B3
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A method for generating a high frequency power with a predetermined frequency and power converter
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DE102016124233A1
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Protection arrangement for protecting a transformer and method for protecting a transformer
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KR20180021383A
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Nonlinear high-frequency amplifier device
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DE102015212232A1
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Power combiner for coupling high-frequency signals and power combiner arrangement with such a power combiner
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