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SURFACE TECHNOLOGY SYSTEMS PLC

Overview
  • Total Patents
    30
About

SURFACE TECHNOLOGY SYSTEMS PLC has a total of 30 patent applications. Its first patent ever was published in 1997. It filed its patents most often in United States, EPO (European Patent Office) and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets semiconductors, electrical machinery and energy and chemical engineering are SURFACE TECH SYS LTD, SURFACE TECHNOLOGY SYSTEMS LTD and SUZUKI KEN.

Patent filings per year

Chart showing SURFACE TECHNOLOGY SYSTEMS PLCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Bhardwaj Jyoti Kiron 25
#2 Lea Leslie Michael 18
#3 Hopkins Janet 6
#4 Ashraf Huma 6
#5 Hynes Alan Michael 4
#6 Ryan Martin Edward 3
#7 Haynes David Mark 3
#8 Shepherd Nicholas 3
#9 Guibarra Edward 3
#10 Khamsehpour Babak 3

Latest patents

Publication Filing date Title
US6534922B2 Plasma processing apparatus
EP1188180A1 Improvements relating to plasma etching
EP1088329A1 Method and apparatus for stabilising a plasma
EP1084076A1 Chlorotrifluorine gas generator system
EP1055250A1 Plasma processing apparatus
EP1131847A1 A method for etching a substrate
US7141504B1 Method and apparatus for anisotropic etching
US6355181B1 Method and apparatus for manufacturing a micromechanical device
EP1324371A1 Plasma processing apparatus
EP0822582A2 Method of etching substrates