Method for exposing an object, e.g. a photoresist layer to a substantially parallel light
DE4433343A1
Method and device for aligning and connecting a plurality of disks aligned with one another and arranged one above the other
DE4304301A1
Transport system and method for objects to be aligned with one another
DE4219132A1
Bonded silicon@ wafer-glass or silicon@-silicon@ joint prodn. - comprises using laser light radiation to initially fix materials at spot(s) and/or lines and conventional high temp. bonding for pressure and acceleration sensors or micro-system elements
EP0450592A2
Alignment system, particularly for X-ray or photolithography
DE4033556A1
MEASURING ARRANGEMENT FOR X, Y, (PHI) COORDINATE TABLES
EP0387838A2
Apparatus for producing a plasma source having a higher radiation intensity in the x-ray range
DE4000785A1
ADJUSTMENT TOKENS FOR TWO OBJECTS TO BE ADJUSTED
DE3616960A1
OPTICAL ARRANGEMENT FOR GENERATING CROSSED LINEAR IMAGE ELEMENTS
DE3339970A1
DEVICE FOR AUTOMATIC FOCUSING OF OPTICAL DEVICES
DE3212393A1
INTERFERENCE LUBRICATION METHOD AND ALIGNMENT METHOD AND DEVICE
DE3140087A1
Device for scratching a substrate made of glass or a glass-like material, especially for the production of liquid crystal displays
DE3117254A1
Microscope having a joint (hinge, articulation) between the eyepiece tube and the objective tube
DE3116634A1
Device for automatically adjusting planar objects having two reference points, in particular in the production of semiconductor components
DE2834204A1
Microscope using split beam for simultaneous focusing of two objects - has adjuster for beam reflector w.r.t. optical axis corresponding to extension of split beam path
GB1540621A
Wedge-error correction devices for use in the manufacture of electronic circuits
DE2605940A1
Mask adjusting and illuminating device - has device for automatic collection of substrate plates and delivery to preadjustment station
DE2454347A1
Exposure-instrument for light-sensitive varnish-coat - comprises relative periodic motion device for each ray emitted
US3889544A
Lead-screw-fine adjustment drive for a slide
DE2256759A1
METHOD FOR TWO-SIDED EXPOSURE OF A SEMICONDUCTOR OR SUBSTRATE PLATE, IN PARTICULAR A WAFER, AND DEVICE FOR PARALLEL AND ROTATING ALIGNMENT OF SUCH A PLATE PURPOSE PERFORMING THE METHOD
