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Flat magnetron
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Method of depositing materials on a wafer to eliminate the effect of cracks in the deposition
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System for and method of providing a controlled deposition on wafers
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Apparatus for, and method of, depositing a film on a substrate
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Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus
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Apparatus for depositing a thin layer of sputtered atoms on a member
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Apparatus for depositing a thin film of a sputtered material on a member
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Wafer processing machine
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Wafer processing machine
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