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SPEEDFAM CLEAN SYSTEM CO LTD

Overview
  • Total Patents
    26
About

SPEEDFAM CLEAN SYSTEM CO LTD has a total of 26 patent applications. Its first patent ever was published in 1996. It filed its patents most often in Japan, United States and Malaysia. Its main competitors in its focus markets chemical engineering, semiconductors and machines are SPEEDFAM CLEAN SYSTEM KK, LEDTECH CO LTD and ADVANCED WET TECHNOLOGIES GMBH.

Patent filings in countries

World map showing SPEEDFAM CLEAN SYSTEM CO LTDs patent filings in countries
# Country Total Patents
#1 Japan 13
#2 United States 11
#3 Malaysia 1
#4 Singapore 1

Patent filings per year

Chart showing SPEEDFAM CLEAN SYSTEM CO LTDs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Terui Yoshinobu 9
#2 Fukumura Masato 6
#3 Sugai Junichi 6
#4 Nagaki Hiroaki 5
#5 Nagaoka Kazutoshi 4
#6 Fujii Masashi 3
#7 Yamahira Minoru 3
#8 Akanuma Shigeo 3
#9 Tsuchida Shigenori 2
#10 Eiki Hiroaki 2

Latest patents

Publication Filing date Title
JP2008142590A Scrub washing apparatus
JP2007229595A Water-flushing type cleaner
JP2003163148A Method of removing resist film and apparatus for removing resist film
JP2003151943A Scrub cleaning apparatus
JP2003104544A Wet treatment device for rectangular board
JP2003093978A Method and apparatus for cleaning carrier plate
JP2003053285A Method and apparatus for cleaning drum substrate for photosensor
JP2003053286A Cleaning apparatus for drum substrate for photosensor
JP2002338041A Method and device for treating substrate
JP2002252199A Method and system for processing work with vapor
JP2002222790A Drying method of work
JP2002158205A Work drier
JP2001219130A Cleaning device for thin work
US5836325A Running water type washing machine
US5709235A Running water type washing machine