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KR20200029207A
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A equipment front end module
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KR20190121899A
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multipurpose mix cup
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KR20180130176A
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A window having a forcing ventilation module
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KR20180130175A
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A forcing ventilation module
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KR20160123774A
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The auto pressure controller
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The auto pressure controller
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The valve device
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The apparatus for transferring the wafers
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Automatic pressure controller having high stability control valve for semi-conducter process
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Automatic pressure controller having high stablity control valve for semi-conducter process
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Loadlock chamber
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