Process and device to crystallize amorphous semiconductor especially amorphous silicon layers uses at least two successive melting radiation pulses separated by one microsecond
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Laser system which combines beams of two or more lasers, has beams directed onto beam splitter and mirror, so that reflected radiation passes through beam splitter and back to resonator
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Gas discharge laser, such as excimer laser or molecular fluorine laser, has e.g. adjustable diverging lens and converging lens in resonator to compensate for thermal lens effect
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Device for converting the intensity distribution of a laser beam
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Device and method for controlling the intensity distribution of a laser beam
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Optical device for homogenisation of laser radiation
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Producing mask for laser radiation
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Device for imaging laser radiation on a substrate
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Laser beam energy or its distribution monitoring device
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Imaging optics for the imaging of a light beam
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Optical system for excimer laser
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Traversing beam high vacuum irradiation chamber - having minimal area beam inlet window and internal beam location device
