|
US2021088804A1
|
|
MEMS Actuator System
|
|
US2020152856A1
|
|
Piezo Actuator Fabrication Method
|
|
US2020099317A1
|
|
MEMS Actuation System
|
|
US2020099318A1
|
|
MEMS Actuation System
|
|
US2020084381A1
|
|
MEMS Locking System
|
|
CN111656240A
|
|
MEMS actuation system
|
|
CN111527439A
|
|
MEMS actuation system
|
|
US2018072562A1
|
|
Mems actuation systems and methods
|
|
WO2017204858A1
|
|
Shock caging features for mems actuator structures
|
|
US2017359003A1
|
|
Electric connection flexures
|
|
US2017190569A1
|
|
Shock caging features for MEMS actuator structures
|
|
US2017133950A1
|
|
MEMS actuator package architecture
|
|
US2017190568A1
|
|
MEMS actuator structures resistant to shock
|
|
US2017088415A1
|
|
MEMS grid for manipulating structural parameters of MEMS devices
|
|
US2017088418A1
|
|
Simplified MEMS device fabrication process
|
|
US2015341534A1
|
|
Electrical bar latching for low stiffness flexure MEMS actuator
|
|
US2017040909A1
|
|
Multi-directional actuator
|
|
US2015350500A1
|
|
Moving image sensor package
|
|
US2015321900A1
|
|
Low stiffness flexure
|
|
US2016268927A1
|
|
Comb drive with non-parallel overlapping comb fingers
|
