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Tunable MEMS capacitor
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Microfabricated blades
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Method for making a multi-die chip
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Separating a microkeratome blade from a wafer
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Multi-fixture assembly of cutting tools
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Electrically isolated support for overlying MEM structure
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Particle filter for microelectromechanical systems
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Chip interconnect bus
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Chip with passive electrical contacts
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Method for tiling unit cells
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Unit cell architecture for electrical interconnects
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Multi-level shielded multi-conductor interconnect bus for MEMS
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Interconnect bus crossover for MEMS
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Shielded multi-conductor interconnect bus for MEMS
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Self-shadowing MEM structures
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Microelectromechanical system and method for producing displacement multiplication
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