| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 6 | |
| #2 | WIPO (World Intellectual Property Organization) | 6 | |
| #3 | Taiwan | 5 | |
| #4 | United States | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Surface technology and coating | |
| #3 | Optics |
| # | Name | Total Patents |
|---|---|---|
| #1 | Koren Zion | 8 |
| #2 | Cardena Rudy Santo Tomas | 7 |
| #3 | Taoka James Tsuneo | 7 |
| #4 | Sharangpani Rahul | 5 |
| #5 | Tay Sing-Pin | 5 |
| #6 | Shooshtarian Sohaila | 3 |
| #7 | Zernickel Dieter | 3 |
| #8 | O Carroll Conor Patrick | 3 |
| #9 | Elbert Mike | 3 |
| #10 | Ma Yorkman | 3 |
| Publication | Filing date | Title |
|---|---|---|
| WO0203438A1 | Method and apparatus for rapid thermal processing (rtp) of semiconductor wafers | |
| US6303524B1 | High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques | |
| EP1240666A2 | GROWTH OF ULTRATHIN NITRIDE ON Si(100) BY RAPID THERMAL N 2? TREATMENT | |
| EP1051544A2 | Process chamber and method for depositing and/or removing material on a substrate |