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LAM RES

Overview
  • Total Patents
    18
About

LAM RES has a total of 18 patent applications. Its first patent ever was published in 1999. It filed its patents most often in United States, Singapore and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets surface technology and coating, semiconductors and machine tools are NOVELLUS SYSTEMS INC, METALOR TECHNOLOGIES JAPAN CORP and BLUE29 LLC.

Patent filings per year

Chart showing LAM RESs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Deyoung James P 4
#2 Wagner Mark I 4
#3 Kolics Artur K 3
#4 Li Shijian 3
#5 Ivanov Igor C 3
#6 Arunagiri Tiruchirapalli N 3
#7 Xu Cangshan 2
#8 Owczarz Aleksander 2
#9 Zhao Yuexing 2
#10 Boyd John M 2

Latest patents

Publication Filing date Title
US2010184301A1 Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process
US2010062164A1 Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating Process
US2008149147A1 Proximity head with configurable delivery
US6569004B1 Polishing pad and method of manufacture