Method for producing high-frequency power and power supply system having power converter for supplying load with power
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A method of phasing multiple RF power generation units of an RF power supply system and RF power supply system
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Heatsink system for an electrical device
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Method for determining consumed or remaining service life of e.g. power supply, involves determining component interval service life by multiplying aging acceleration factor with operation interval duration
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Method and device for protecting passive components connected to a high frequency generator
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Method for observing status of plasma chamber to control process of coating e.g. glass substrate, during semiconductor manufacturing process, involves supplying measurement signal into plasma chamber with measurement signal frequency
DE102010063046A1
Method for determining delays between generation of switching command and/or edge of control signal and associated switching moment of semiconductor switch, involves determining switch-on delay and/or switch-off delay of switch
DE102010048810A1
System for operating multiple plasma and / or induction heating processes
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Power supply system for a plasma application and / or an induction heating application
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Ignition circuit for igniting a powered with alternating power plasma
DE102010030514A1
Clocked power converter, has comparator circuit comprising timer for limiting variable frequency of comparator signal to upper frequency limit that is formed above filter cut-off frequency and below driving frequency
DE102010002754A1
Plasma supply arrangement with quadrature coupler
DE102010002753A1
Plasma power supply arrangement with multiple power coupling stages
DE102009054987A1
Method for generating AC power
DE102009054449A1
Self-balancing RF plasma power supply
DE102009046754A1
Method for operating carbon dioxide laser during industrial plasma process, involves realizing power producing and supplying step, parameter processing step and unit controlling step before discharge is present in chamber
DE102009010753A1
Method for determining the switching time of a semiconductor switch
WO2010091696A1
Module for a plasma supply unit and plasma supply unit
WO2010091697A1
Method for supplying power to a plasma process and plasma supply device
EP2202776A1
Measuring method and device for a plasma supply device
