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Position alignment system for holographic lithography process
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EP0930549A1
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Optic for a total internal reflection (TIR) holographic system
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WO9745861A1
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Device for gripping and holding a substrate
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DE19620234A1
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Method and device for positioning a substrate
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GB9605235D0
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Method and apparatus for holographically recording an essentially periodic pattern
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US5640257A
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Apparatus and method for the manufacture of high uniformity total internal reflection holograms
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Characterising multilayer thin film systems by interferometry
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GB9419086D0
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Method for printing of a pattern of features
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GB9304716D0
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Manufacture of alignment marks for holographic lithography
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Apparatus and method for the manufacture of high uniformity total internal reflection holograms
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GB9205560D0
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Manufacture of high accuracy T1R holograms for full-field lithography processes
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GB9108760D0
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Measurement of the separation between two surfaces
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Apparatus for and a method of transverse position measurement in proximity lithographic systems
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Anti-reflection masks
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Apparatus for and method of optical inspection in a total internal reflection holographic imaging system
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GB8821643D0
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Apparatus for detecting focus
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GB8821644D0
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Method of detecting focus
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EP0292209A1
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A method of speckle reduction in laser replayed holographic images
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EP0278714A2
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Improvements in apparatus for the positional detection of objects
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GB8802333D0
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Improvements in manufacture of integrated circuits using holographic techniques
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