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Method and device for decreasing stray light of laser in particulate sensor
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Method to detect non-spherical particles using orthogonally polarized light
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Self aligning vacuum seal assembly
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Particle sensor and particle detecting method
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Particle monitor for throttled pumping systems
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Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions
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Particle monitor for loadlock soft pump lines
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Modular particle monitor for vacuum process equipment
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In situ real time particle monitor for a sputter coater chamber
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Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment
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Low cost stage for raster scanning of semiconductor wafers
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Method for synchronizing particle counters to external events
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Concentrator funnel for vacuum line particle monitors
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High sensitivity, large detection area particle sensor for vacuum applications
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Laser safe housing for a particle monitor in vacuum pump lines
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High sensitivity, large detection area particle sensor for vacuum applications
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Real-time particle sensor for disk drives
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Real-time particle counter for liquids with nebulizer and dryer
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Scattering-type particle detection device for use in high temperature process chambers
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Velocity monitoring method and apparatus
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