Automatic particle detector for inspecting integrated circuit slice - uses lamp which is reflected by collimating mirror onto slice held by vacuum clamp, TV camera and processor
JPS58191936A
Monochroic picture device
NL8105039A
Automatic particle detector for inspecting integrated circuit slice - uses lamp which is reflected by collimating mirror onto slice held by vacuum clamp, TV camera and processor
DE3143695A1
Method and device for detecting particles on a body
US4394688A
Video system having an adjustable digital gamma correction for contrast enhancement
US4412246A
Method of adjusting a video microscope system incorporating polarization or interference optics for optimum imaging conditions
US4455087A
Monochromatic imaging apparatus
US4377340A
Method and apparatus for detecting particles on a material