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MEMS proof mass with split z-axis portions
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MEMS multi-axis accelerometer electrode structure
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Micromachined monolithic 6-axis inertial sensor
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Refrigerator with a pressure-equalizing seal
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Evaporator unit and cooler using same
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Micromachined piezoelectric x-axis gyroscope
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Micromachined inertial sensor devices
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Integrated multi-axis micromachined inertial sensing unit and method of fabrication
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Micromachined accelerometer and method with continuous self-testing
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Multi-axis micromachined accelerometer and rate sensor
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Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
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Multi-axis micromachined accelerometer
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