| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 13 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Optics | |
| #3 | Micro-structure and nano-technology | |
| #4 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Engl Karl | 13 |
| #2 | Hoeppel Lutz | 7 |
| #3 | Rode Patrick | 5 |
| #4 | Maute Markus | 4 |
| #5 | Sabathil Matthias | 4 |
| #6 | Weimar Andreas | 2 |
| #7 | Hahn Berthold | 2 |
| #8 | Rammelsberger Stefanie | 2 |
| #9 | Strassburg Martin | 2 |
| #10 | Kasprzak-Zablocka Anna | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2007205525A1 | Method for producing structures in optoelectronic components and device for this purpose |