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JPH1112084A
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Apparatus for measuring substrate temperature
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JPH10162765A
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Secondary electron collector
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JPH10106466A
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Magnetic field type objective electron lens
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JPH09315886A
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Heat-insulating device for thin film forming molecular beam source
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JPH0948689A
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Radical beam emission apparatus and radical beam emission method
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JPH0945963A
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Gan based semiconductor device
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JPH08319193A
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Radical beam generator
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JPH08193964A
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Thin-film forming device
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JPH07312387A
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Substrate transport device in vacuum system
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JPH07268613A
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Molecular-beam cell
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JPH05305091A
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Surgical in vivo freeze operating tool and organism tissue collecting device
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JPH04329625A
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Fixer of semiconductor substrate
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JPH0589817A
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Complex analysis device
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JPH01147056A
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Vacuum thin film-forming apparatus
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