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Narrow width loadport mechanism for cleanroom material transfer systems
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Horizontal displacement mechanism for cleanroom material transfer systems
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Substrate container storage system
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Integrated systems for interfacing with substrate container storage systems
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Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
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Method and apparatus for wafer support
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End effector with sensing capabilities
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Environmental isolation system for flat panel displays
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Variable lot size load port
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Method and apparatus for transporting, queuing, and loading of large area substrates in multi-tool processing operations
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Loader and buffer for reduced lot size
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Variable pitch storage shelves
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