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Vacuum coupling arrangement and vacuum arrangement
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Coupling device, vacuum arrangement, method and control device
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EP3812481A1
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Evaporation arrangement, control device and method
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Vacuum arrangement and vacuum chamber
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Valve assembly, vacuum assembly and method
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DE102019124489B3
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Vacuum arrangements, methods and use of an electrode in a vacuum
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Method and control device
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Processing arrangement, sputtering device, method
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DE102019118941A1
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Coating arrangement and procedure
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DE102019118936A1
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Coating arrangement and procedure
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DE102019118934A1
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Particle Separation Device, Coating Arrangement and Process
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Optical low-emission multilayer system
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Sputter cathode magnet system and vacuum arrangement
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Magnetron End Block Housing, Magnetron End Block and Process
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End block arrangement and processing arrangement
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Temperature control roller, transport arrangement and vacuum arrangement
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DE102019107542A1
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Method, magnetron target, magnetron arrangement and vacuum arrangement
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Supply device, method and processing arrangement
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Method, sputter target and processing arrangement
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DE102019101776A1
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Coating arrangement and method
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