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AMTECH SYSTEMS INC

Overview
  • Total Patents
    23
  • GoodIP Patent Rank
    239,672
About

AMTECH SYSTEMS INC has a total of 23 patent applications. Its first patent ever was published in 1984. It filed its patents most often in United States, EPO (European Patent Office) and Republic of Korea. Its main competitors in its focus markets environmental technology, semiconductors and electrical machinery and energy are CHOO SEONG ENGINEERING CO LTD, JUNSUNG ENGINEERING CO LTD and KINGSTONE SEMICONDUCTOR LTD COMPANY.

Patent filings per year

Chart showing AMTECH SYSTEMS INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Hwang Jeong-Mo 6
#2 Martin John M 6
#3 Harrison Arthur W 6
#4 Edwards Allen D 3
#5 Rhieu Ji H 2
#6 Whang J S 2
#7 Hwang James-Mo 2
#8 Hwang Jeong Mo 1
#9 Wollmann Andrew J 1
#10 Gravelle Kelly 1

Latest patents

Publication Filing date Title
US2015021389A1 Vehicle tolling system with occupancy detection
US2014057387A1 Systems and Methods for Depositing and Charging Solar Cell Layers
US2014057386A1 Systems and methods for depositing and charging solar cell layers
US2014057388A1 Systems and Methods for Depositing and Charging Solar Cell Layers
US2014150850A1 Solar cell coating
CN103430327A Systems and methods for charging solar cell layers
EP2413368A2 Charge control of solar cell passivation layers
WO2011156560A1 Solar cell silicon wafer process
US2002154970A1 Wafer boat elevator system and method
EP1139392A2 Improved wafer boat support and method for twin tower wafer boat loader
US6537010B2 Wafer boat support and method for twin tower wafer boat loader
US6352399B1 Twin tower wafer boat loading system and method
US6143477A Dual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafers
US5765982A Automatic wafer boat loading system and method
US5215588A Photo-CVD system
US4767251A Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes
EP0172653A2 Slotted cantilever diffusion tube system and method and apparatus for loading
KR920001172B1 Cantilever diffusion tube apparatus and method