| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 13 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Optics | |
| #3 | Measurement | |
| #4 | Surface technology and coating |
| # | Name | Total Patents |
|---|---|---|
| #1 | Yoo Woo S | 13 |
| #2 | Kang Kitaek | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2007146685A1 | Dynamic wafer stress management system | |
| US2007026690A1 | Selective frequency UV heating of films | |
| US2007039630A1 | Wet clean and drying method and apparatus | |
| US2007042118A1 | Encapsulated thermal processing | |
| US2006128160A1 | Photoresist strip using solvent vapor | |
| US2006099827A1 | Photo-enhanced UV treatment of dielectric films | |
| US2006035449A1 | Method of forming ultra shallow junctions |