A method of processing substrate holder material as well as a substrate holder processed by such a method.
NL1037228A
Support assembly for a substrate holder, and a device device depending on different semiconductor materials on a semiconductor substrate, fitted with such a support assembly.
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Device for layerally depositing different materials on a semiconductor substrate as well as a lifting pin for use in such a device.
WO2007145505A1
Method for manufacturing a device for supporting a substrate during the manufacture of semiconductor components, as well as such a device
NL1031985C2
Method for manufacturing device for supporting substrate during semiconductor manufacture, involves forming surface roughness on upper surface of plate by electromagnetic radiation without disturbing initial flat surface of plate
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Device for supporting a substrate and a method for manufacturing such a device.
US2006001028A1
Method for the treatment of a surface of a metal-carbide substrate for use in semiconductor manufacturing processes as well as such a metal-carbide substrate
EP1612851A1
A method for the treatment of a surface of a metal-carbide substrate for use in semiconductor manufacturing processes as well as such a metal-carbide substrate
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Bonding ceramic substrate containing silicon to metallic material, by providing intermediate, reactive solder and metal layers on substrate and then heating
NL1015550C2
A method for manufacturing a core-built susceptor, thus-obtained susceptor, and a method for applying active layers to a semiconductor substrate using such a susceptor.
NL1013954C2
A method of manufacturing an electrode for a plasma reactor and such an electrode.
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The mfr. of a chuck to hold an object by means of an electrostatic field
