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Micro-machined membrane valve
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Micromachined filter for a micropump
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Sealed coupling method
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MICROPUMP WITH INTEGRATED INTERMEDIATE PART
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WATERPROOF CONNECTION PROCESS BETWEEN A MECHANICAL BODY AND THE GLASS WALL OF A COMPONENT
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Micropump
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Micropump.
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Plaster for transdermal delivery of a medicament.
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Piezoelectric micropump excitation voltage control.
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Micropumps
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A valve equipped with a position detector and a micropump incorporating said valve
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Valve and micropump incorporating said valve
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Manufacturing thin plates having surface structures of different depths or heights
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Valve fitted with a contact position detector and micropump comprising such a valve
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Integrated valve and micropump comprising such a valve
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Membrane micropump
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Silicon wafer valve with position detector for micropump
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Anti-return valve, particularly for micropump and micropump provided with such a valve
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Valve fitted in micro-pump
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Micropump having a constant output
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