Vaporizer, and film deposition apparatus with vaporizer
JP2014159644A
Vaporizer, mocvd vaporizer using this vaporizer, center rod used in these vaporizers, carrier gas dispersion method and carrier gas vaporization method
WO0147808A1
Method for producing silica particles, synthetic quartz powder and synthetic quartz glass
US6888041B1
Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
