ITTO20100070A1
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VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP.
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JP2010045028A
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Vacuum pumping system equipped with sputter ion pumps
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JP2009186013A
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Support member for rolling bearing
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EP2108930A1
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Contact-less device for measuring operating parameters of rotors of high-speed rotary machines
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EP2071188A1
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Device for the deposition of non-evaporable getters (NEGs) and method of deposition using said device
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EP2020508A1
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Overpressure safety device for a vacuum pump
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EP2017480A1
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Split joint for vacuum pumps and method for obtaining said joint
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US2008253903A1
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Vacuum pumps with auxiliary pumping stages
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US2008056885A1
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Vacuum pumps with improved pumping channel configurations
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US2008056886A1
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Vacuum pumps with improved pumping channel cross sections
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EP1863068A1
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Magnet assembly for a sputter ion pump
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EP1722210A2
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Pressure sensor with a vibrating member
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EP1772719A1
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Device and method for detecting the presence of test gas
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EP1739308A1
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Vacuum pump
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JP2005315262A
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Oil rotary vacuum pump, and its manufacturing method
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EP1619400A1
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Annular support for rolling bearings
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EP1619395A1
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Rotary vacuum pump, structure and method for the balancing thereof
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EP1519402A1
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Ionisation vacuum gauge
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EP1519401A1
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Ionisation vacuum gauge
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EP1482178A1
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Vacuum pumping device
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