| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 7 | |
| #2 | EPO (European Patent Office) | 3 | |
| #3 | Japan | 2 | |
| #4 | WIPO (World Intellectual Property Organization) | 2 |
| # | Industry | |
|---|---|---|
| #1 | Thermal processes | |
| #2 | Semiconductors | |
| #3 | Surface technology and coating | |
| #4 | Electrical machinery and energy |
| # | Technology | |
|---|---|---|
| #1 | Single-crystal-growth | |
| #2 | Semiconductor devices | |
| #3 | Special electric heating or lighting | |
| #4 | Furnaces | |
| #5 | Details of furnaces |
| # | Name | Total Patents |
|---|---|---|
| #1 | Erickson Ronald E | 14 |
| #2 | Peck Kevin B | 9 |
| #3 | Matthews Stephen H | 8 |
| #4 | Mcentire William D | 5 |
| Publication | Filing date | Title |
|---|---|---|
| US5461214A | High performance horizontal diffusion furnace system | |
| US5038019A | High temperature diffusion furnace |