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CN103104439A
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Gas circuit distribution system used for multistage dry vacuum pump
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CN103104490A
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Magnetic drive screw vacuum pump
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CN103103491A
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PLC virtual device control system for vacuum coating equipment and control method
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CN103103495A
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Full-automatic downward transmission system
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CN103103486A
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Magnetron sputtering system
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CN103103484A
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Magnetron sputtering system with single-heating self-rotation disc
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CN103104489A
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Roots vacuum pump
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CN103103622A
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Water-cooled jacket capable of working in high-temperature environment of vacuum equipment for long time
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CN103103499A
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Labyrinth air-inlet device for vacuum chamber of large plate-type PECVD (plasma enhanced chemical vapor deposition) apparatus
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CN103105826A
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Motion positioning control system of vacuum equipment and control method
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CN103104437A
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Vacuum pump seal structure
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CN103104493A
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Oil-free dry vacuum pump double-driving main shaft control system
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CN103104496A
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Vacuum pump water-cooling structure
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CN103103483A
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Magnetron sputtering system with substrate water-cooling heating revolution table
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CN103103485A
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Magnetron sputtering system with single-cooling self-rotation disc
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CN103103603A
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Water-cooling shaft capable of working in high-temperature environment in vacuum equipment for a long time
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CN103107207A
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Multilayer film structure for improving conversion efficiency of crystalline silicon solar cell
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CN103104498A
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Vortex vacuum pump exhaust port structure
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CN103103500A
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Multipoint-gas-inlet multi-region adjusting device used for PECVD (Plasma Enhanced Chemical Vapor Deposition)
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CN103104491A
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Roots and claw-type rotor combined multi-stage dry vacuum pump
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