KR102229123B1
|
|
Blankmask and photomask using the same
|
KR102187486B1
|
|
Method and apparatus for decision for status of a robot
|
KR102235042B1
|
|
Method and apparatus for measuring displacement of end effector
|
KR102167687B1
|
|
Wafer holder for apparatus manufacturing a semiconductor device and edge ring assembly comprising the same
|
KR102201336B1
|
|
Wafer holder for apparatus manufacturing a semiconductor device and edge ring assembly comprising the same
|
KR20210029395A
|
|
Polishing pad with depth adjustable grooves and polishing apparatus comprising the same
|
JP2020027945A
|
|
Ring-shaped element for etcher and method for etching substrate using the same
|
US2020062654A1
|
|
Boron carbide sintered body and etcher including the same
|
KR20200019069A
|
|
Ring type component for etching apparatus and method for etching substrate with the same
|
KR20200009576A
|
|
Apparatus of supplying slurry and method of forming the slurry
|
KR20200009561A
|
|
Method of forming slurry having hot-water curing
|
KR20200009568A
|
|
Apparatus of forming slurry and method of forming the slurry
|
KR20180093814A
|
|
Plasma processing apparatus having boron carbide and method of manufacturing the apparatus
|
KR20180065899A
|
|
Plasma processing apparatus having tungsten boride and method of manufacturing the apparatus
|
KR20190060070A
|
|
Parts for plasma processing apparatus having tungsten carbide and method of manufacturing the parts
|
KR20180080983A
|
|
Parts for plasma processing apparatus having tungsten oxide bulk
|
WO2017222201A1
|
|
Component made of tungsten carbide bulk for plasma device
|
KR20180117275A
|
|
Plasma processing apparatus having reaction bonded boron carbide and method of manufacturing the apparatus
|
KR101868736B1
|
|
Apparatus of manufacturing molded article using polymer envelope
|
KR101849037B1
|
|
Parts for plasma processing apparatus having tungsten based corrosion-resisting plate and method of manufacturing the parts
|