Device for force- or displacement measurement, has two meander arrangements connected to each other by coupling piece to form parallel spring arrangement, where each meander arrangement has neutral silicon springs and active silicon springs
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Sensor for the tactile measurement of forces and moments
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Instrument transformers for sensor technology
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Device for measuring small and large forces
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Device for tactile measurement of three-dimensional forces, has touch element, tracer pin and parallel spring-elements with strain sensors, where parallel spring-element is arranged transverse to tracer pin
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Device for the simultaneous measurement of forces
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Surface`s translation and tilt measuring method for scanning probe microscope, involves focusing measuring beam of interferometer with optical system, and utilizing reflecting beam after beam split for measuring surface tilt
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Method and device for tactile detection
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Arrangement for interferometric path and angle measurement
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Multiple beam splitter
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Method and device for measuring profile deviations
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Method and device for calibration of applanation tonometers
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Device for measuring mechanical quantities
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Temperature measuring device coupled by an optical waveguide
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Device for frequency-stabilisation of He-Ne internal mirror lasers
