|
KR20200012510A
|
|
Air cylinder
|
|
KR20190105987A
|
|
A vaccum chuck for wafer
|
|
KR20190082486A
|
|
Air bearing spindle
|
|
WO2019013368A1
|
|
Stiffness control apparatus of air bearing
|
|
WO2019013367A1
|
|
Stiffness control apparatus of air bearing
|
|
KR20190007172A
|
|
Apparatus for adjusting stiffness of air bearing
|
|
KR20190007173A
|
|
Apparatus for adjusting stiffness of air bearing
|
|
KR101840161B1
|
|
Superhigh speed air bearing spindle
|
|
KR20170117635A
|
|
Radial air bearing with the High-speed air bearing spindle
|
|
KR101604989B1
|
|
Ultra sonic air bearing spindle
|
|
KR20130095466A
|
|
The vaccum chuck molded wafer manufacturing
|
|
KR20130039829A
|
|
Wafer dicing for air bearing equip stopper
|
|
KR101181705B1
|
|
Foreign substance inflow preventing structure of air bearing spindle
|
|
KR101176821B1
|
|
Vacuum chuck making device for temperature control type wafer
|
|
KR20120099946A
|
|
Thrust bearing cooling structure of superhigh speed air bearing
|
|
KR101041389B1
|
|
All-in-one ultrahigh speed shaft with rotor and manufacturing method of the same
|
|
KR20110085313A
|
|
Hybrid hydrostatic bearing
|
|
KR20090013299A
|
|
The rotating table using air bearing
|
|
KR100877120B1
|
|
High precision balancingmachine rolling shaft supporter applying air bearing
|
