|
US6907904B2
|
|
Fluid delivery system and mounting panel therefor
|
|
US6869818B2
|
|
Method for producing and testing a corrosion-resistant channel in a silicon device
|
|
WO03009319A1
|
|
Micro-electromechanical sensor
|
|
US6325886B1
|
|
Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby
|
|
US6123107A
|
|
Apparatus and method for mounting micromechanical fluid control components
|
|
US6237394B1
|
|
Apparatus and method for correcting drift in a sensor
|
|
US6160243A
|
|
Apparatus and method for controlling fluid in a micromachined boiler
|
|
WO9853236A1
|
|
Low-power thermopneumatic microvalve
|
|
US5865417A
|
|
Integrated electrically operable normally closed valve
|
|
US5270125A
|
|
Boron nutride membrane in wafer structure
|
