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KR20140005083A
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Plasma generation apparatus and plasma generation method
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Plasma generation apparatus and plasma generation method
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Plasma generation apparatus and plasma generation method
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Impedance matching apparatus, linear motion module, and radio ffrequency power supply apparatus
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Plasma generation apparatus
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Rf power disdtribution apparatus and rf power disdtribution method
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Rf power disdtribution apparatus and rf power disdtribution method
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Rf power disdtribution apparatus and rf power disdtribution method
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Impedance matching apparatus
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Rf signal processing apparatus and rf signal processing method
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Sensor for measuring electrical characteristics
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Vaccuum processing appratus and the processing method of the same
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Impedance matching methods and electric apparatus performing the same
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Arc detection apparatus and arc monitoring method
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Arc detecting apparatus and method for monitoring of arc
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Impedance matching methods and systems performing the same
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An antenna cooling device for inductively coupled plasma generator
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A temperature control device of dielectric lid for inductively-coupled plasma processing unit
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An easy maintenance substrate manufacturing apparatus
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An inductive coupled plasma antenna module using multi-ferromagnetic core, and substrate manufacturing apparatus
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