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JPH1182346A
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Vacuum device and operation thereof
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JPH1137087A
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Molecular pump
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JPH10259793A
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Molecular pump
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JPH10252684A
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Molecular pump
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JPH09310696A
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Molecular drag pump
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JPH10122179A
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Vacuum pump
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JPH1077967A
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Rapid regenerative cryopump
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JPH09303289A
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Surface treatment method for molecular pump
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JPH09196529A
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Vacuum cooling method
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JPH0932793A
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Molecular pump
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JPH0921420A
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Magnetic bearing device for high speed rotary machine
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JPH08247084A
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Turbo-molecular pump
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JPH08232840A
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Extremely high vacuum pump system
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JPH08109896A
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Screw groove type vacuum pump
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JPH08100767A
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Supporting device for vacuum exhaust device
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JPH0814188A
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Turbo-molecular pump
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JPH07301212A
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Attaching device of blocking cover in vacuum device
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JPH07279853A
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Traveling-wave tube wall type vacuum pump
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JPH0727089A
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Vacuum pump device
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JPH074383A
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Compound molecular pump
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