|
US6865313B2
|
|
Bistable latching actuator for optical switching applications
|
|
WO03035542A2
|
|
Method of fabricating vertical actuation comb drives
|
|
US6807342B2
|
|
Fiber optic tunable filter using a fabry-perot resonator
|
|
US6633708B1
|
|
Micromachined apparatus and technique to align two dimensional fiber array
|
|
US2002118084A1
|
|
Latching mechanism for MEMS actuator and method of fabrication
|
|
EP1146360A2
|
|
Fiber optic switch using micro-electro-mechanical systems (MEMS)
|
|
US2002085796A1
|
|
Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips
|
|
US6494095B1
|
|
Micro electromechanical switch for detecting acceleration or decelaration
|
