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Negative electrode for arc plasma source
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Film deposition apparatus
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Formation of film using electron beam plasma
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Formation of diamond like carbon film
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Plasma processing device
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Plasma generator
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Device for depositing diamond-like carbon film
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Diamondlike carbon thin film depositing device
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Plasma generating device
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Diamond-like carbon thin film deposition apparatus
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Microwave feed device and plasma generating device making use thereof
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Mixed type rf plasma generating device
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Ecr plasma generating device
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Ecr discharge ion source
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