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MTS NANOTECH INC

Overview
  • Total Patents
    15
  • GoodIP Patent Rank
    204,732
About

MTS NANOTECH INC has a total of 15 patent applications. Its first patent ever was published in 2012. It filed its patents most often in Republic of Korea, United States and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets surface technology and coating, semiconductors and machine tools are SOLAYTEC B V, WUXI HUIMING ELECTRONIC TECHNOLOGY CO LTD and YUDOVSKY JOSEPH.

Patent filings in countries

World map showing MTS NANOTECH INCs patent filings in countries
# Country Total Patents
#1 Republic of Korea 10
#2 United States 2
#3 WIPO (World Intellectual Property Organization) 2
#4 China 1

Patent filings per year

Chart showing MTS NANOTECH INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Jeong In Kwon 15

Latest patents

Publication Filing date Title
KR20160137743A Atomic layer deposition apparatus and methods
WO2013191469A1 Atomic layer deposition apparatus
WO2013191471A1 Atomic layer deposition apparatus and method
KR20130142869A Apparatus and method for atomic layer deposition
KR20130142860A Atomic layer deposition apparatus
KR20140003054A Atomic layer deposition apparatus with reduced cycle time
KR20130094869A Apparatus for polishing semiconductor wafers
KR20130093900A Apparatus for polishing semiconductor wafers
KR20130093901A Apparatus for polishing semiconductor wafers
KR20130093898A Apparatus for polishing semiconductor wafers