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LUXTRON CORP

Overview
  • Total Patents
    120
About

LUXTRON CORP has a total of 120 patent applications. Its first patent ever was published in 1977. It filed its patents most often in United States, EPO (European Patent Office) and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets measurement, machine tools and semiconductors are SAKANO KAZUHITO, WAHL INSTR INC and C I SYSTEMS LTD.

Patent filings per year

Chart showing LUXTRON CORPs patent filings per year from 1900 to 2020

Focus industries

Top inventors

# Name Total Patents
#1 Sun Mei H 29
#2 Wickersheim Kenneth A 29
#3 Litvak Herbert E 16
#4 Schietinger Charles W 15
#5 Jensen Earl M 13
#6 Adams Bruce E 11
#7 Heinemann Stanley O 9
#8 Phillips Stephen R 8
#9 Rall Dieter L 7
#10 Hoang Anh N 7

Latest patents

Publication Filing date Title
US2004258130A1 In situ optical surface temperature measuring techniques and devices
WO2004010094A1 Emissivity corrected radiation pyrometer integral with a reflectometer and roughness sensor for remote measuring of true surface temperatures
US6572265B1 In situ optical surface temperature measuring techniques and devices
WO0071971A1 Optical techniques for measuring layer thicknesses
US6570662B1 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
US6222632B1 Polarization interferometer spectrometer with rotatable birefringent element
US6028669A Signal processing for in situ monitoring of the formation or removal of a transparent layer
US6406641B1 Liquid etch endpoint detection and process metrology
US5891352A Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
US6010538A In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
US5717608A Electro-optical board assembly for measuring the temperature of an object surface from infra-red emissions thereof, including an automatic gain control therefore
US5464284A Autocalibrating non-contact temperature measuring technique employing dual recessed heat flow sensors
US5769540A Non-contact optical techniques for measuring surface conditions
US5499733A Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
US5414266A Measuring system employing a luminescent sensor and methods of designing the system
US5470155A Apparatus and method for measuring temperatures at a plurality of locations using luminescent-type temperature sensors which are excited in a time sequence
WO9325893A1 Endpoint detection technique using signal slope determinations
US5362969A Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors
US5310260A Non-contact optical techniques for measuring surface conditions
US5304809A Luminescent decay time measurements by use of a CCD camera