Rotor for turbo molecular pump has rotor blades made from an aluminium alloy comprising aluminium, copper, manganese, magnesium cut and shaped by reforming
DE102006020102A1
Lubricant-free vacuum pump used as a turbo molecular pump comprises a gas bearing surface facing a shaft and/or a gas bearing rotor and having a hard layer
DE102006004525A1
Improved efficiency rotary vacuum pump has the inlet time greater than the outlet time to reduce back streaming and increase pumping volume
DE102006004314A1
Vacuum pipe for vacuum pump has annular gas filled damping hose to dampen vibration between vacuum connection sections
DE102005041501A1
Vacuum turbomolecular pump
DE102005041500A1
vacuum pump
DE102005040648A1
Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic
DE102005036942A1
turbomachinery
DE102005031718A1
Rotary vacuum pump
DE102005025261A1
Vacuum pump has housing containing rolling bearing with stator ring and sprung heat bridging element located between housing and ring for rotory shaft thermally connecting the two for better heat conduction
DE102005020904A1
Vacuum pump assembly
DE102005017418A1
Turbo molecular pump has integrated pressure sensor, at pre-vacuum zone, to give actual pressure conditions at outflow from turbo rotor
DE102005015685A1
Rotor for a vacuum pump has a single-piece positive displacer held by two shaft journals on both ends of the positive displacer
DE102005015212A1
Shaft sealing for e.g. rotary screw pump, has seal gap connected with locking gas chamber, and discharge opening connected with gas chamber and suction chamber, where seal gap is arranged between inner and outer sealing rings
DE102005014642A1
Electrodischarge machining device in particular for creation of rotor disk for turbomolecular pump comprising tool designed as triangular loop
HK1069423A1
Method for coating objects.
DE102005008887A1
Single-shaft vacuum displacement pump has two pump stages each with pump rotor and drive motor supported by the shaft enclosed by a stator housing
DE102005008643A1
Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
DE102005006433A1
Vacuum pump system, e.g. for industrial manufacturing plants, has multiple rapidly rotating vacuum pumps fastened jointly on a single rigid frame
