| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Taiwan | 17 |
| # | Industry | |
|---|---|---|
| #1 | Environmental technology | |
| #2 | Chemical engineering | |
| #3 | Machines | |
| #4 | Measurement | |
| #5 | Materials and metallurgy | |
| #6 | Machine tools | |
| #7 | Surface technology and coating |
| # | Name | Total Patents |
|---|---|---|
| #1 | James Mcandrew | 3 |
| #2 | Ronald S Inman | 2 |
| #3 | Daniel Gary | 2 |
| #4 | Benjamin J Jrucik Jr | 1 |
| #5 | Ozawa Eiichi | 1 |
| #6 | Jean-Marie Friedt | 1 |
| #7 | Joseph E Paganessi | 1 |
| #8 | A Nimal Liyange | 1 |
| #9 | Hwa-Chi Wang | 1 |
| #10 | Yokogi Kazuo | 1 |
| Publication | Filing date | Title |
|---|---|---|
| TW351762B | Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy | |
| TW338103B | Polygonal planar multiass cell, system and apparatus including same, and method of use | |
| TW317642B | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | |
| TW279937B | Supply method for B2H6 and SiH4 gas |