A characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic mems resonators
WO2014158107A1
Phase shifting method for reconfigurable transmitarrays and reflectarrays and a unit element thereof
WO2013165325A1
Micro electrochemical sensor
WO2013081560A1
An energy harvesting cochlear implant
KR20130120438A
Cmos compatible microchannel heat sink for electronic cooling and its fabrication
CA2771155A1
A microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (mems) technology
EP2318145A1
Dielectrophoretic cell chromatography device with spiral microfluidic channels and concentric electrodes, fabricated with mems technology
