| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Taiwan | 17 | |
| #2 | WIPO (World Intellectual Property Organization) | 16 | |
| #3 | China | 9 | |
| #4 | United States | 9 | |
| #5 | Republic of Korea | 8 | |
| #6 | Singapore | 6 | |
| #7 | EPO (European Patent Office) | 5 | |
| #8 | Malaysia | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Environmental technology | |
| #3 | Electrical machinery and energy | |
| #4 | Measurement | |
| #5 | Chemical engineering | |
| #6 | Optics | |
| #7 | Machine tools |
| # | Name | Total Patents |
|---|---|---|
| #1 | Hashimoto Shigeki | 22 |
| #2 | Shomori Hirofumi | 19 |
| #3 | Kimura Atsuo | 17 |
| #4 | Funabashi Michimasa | 13 |
| #5 | Ohtagaki Manabu | 12 |
| #6 | Yoshio Hideaki | 10 |
| #7 | Kumagai Akira | 9 |
| #8 | Edo Hiroki | 7 |
| #9 | Otokuni Kenji | 7 |
| #10 | Suzuki Hideaki | 7 |
| Publication | Filing date | Title |
|---|---|---|
| SG11201710129RA | Substrate processing device | |
| CN107615456A | Substrate board treatment and substrate processing method using same | |
| TW201133593A | Substrate processing device |