| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 4 | |
| #2 | EPO (European Patent Office) | 3 | |
| #3 | WIPO (World Intellectual Property Organization) | 2 | |
| #4 | Germany | 1 | |
| #5 | France | 1 | |
| #6 | United Kingdom | 1 | |
| #7 | Republic of Korea | 1 |
| # | Industry | |
|---|---|---|
| #1 | Machines | |
| #2 | Semiconductors | |
| #3 | Telecommunications | |
| #4 | Optics | |
| #5 | Surface technology and coating | |
| #6 | Measurement |
| # | Name | Total Patents |
|---|---|---|
| #1 | Berman Allan | 5 |
| #2 | Struven Kenneth C | 4 |
| #3 | Alling Eric | 3 |
| #4 | Stauffer Craig M | 3 |
| #5 | Allan Berman | 1 |
| #6 | Miranda Henry R | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US5383488A | Apparatus and method for protecting chemical bath seals | |
| EP0492773A1 | High temperature recirculating chemical bath construction | |
| US5056552A | High temperature recirculating chemical bath construction | |
| US5054519A | Recirculating chemical bath with inflow and self balancing outflow | |
| US4749988A | Non-invasive liquid level sensor | |
| GB8518585D0 | Method of producing reversed photoresist images by vapour diffusion |