WO2020252962A1
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Acoustic wave device, and preparation method therefor and temperature control method thereof
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interdigital transducer
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Thin film bulk acoustic wave resonator, filter and preparation method thereof
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A kind of filter and preparation method thereof
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Thin film bulk acoustic wave resonator and preparation method thereof
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One kind combining resonator based on surface acoustic wave and cavity type film bulk acoustic
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Thin film bulk acoustic wave resonator and its processing method based on bonding
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The production method and radio-frequency filter of radio-frequency filter
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It is a kind of using silicon as the thin film bulk acoustic wave resonator preparation method of sacrificial layer
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A kind of temperature-compensating SAW filter and preparation method thereof
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FBAR and its manufacture method with hydrophobic anti-adhesion structure
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The FBAR and processing method combined based on solid-state and cavity
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FBAR with supporting construction and preparation method thereof
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A kind of preparation method of wedge shaped film
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A kind of cavity type SAW resonator and its processing method
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FBAR and its processing method
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A kind of FBAR and preparation method thereof
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FBAR and preparation method thereof
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