| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 4 | |
| #2 | WIPO (World Intellectual Property Organization) | 4 | |
| #3 | Australia | 2 | |
| #4 | Canada | 1 | |
| #5 | EPO (European Patent Office) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Environmental technology | |
| #2 | Semiconductors | |
| #3 | Surface technology and coating | |
| #4 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Madan Arun | 12 |
| #2 | Muhl Stephen | 4 |
| #3 | Von Roedern Bolko | 4 |
| #4 | Yaba Susumu | 3 |
| #5 | Walker Christopher M | 3 |
| #6 | Jianping Xi | 2 |
| #7 | Kobayashi Shigeyoshi | 1 |
| #8 | Kikugawa Shinya | 1 |
| #9 | Xi Jianping | 1 |
| #10 | Roedern Bolko Von | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US5016562A | Modular continuous vapor deposition system | |
| US4865999A | Solar cell fabrication method | |
| US4808462A | Solar cell substrate | |
| US4763602A | Thin film deposition apparatus including a vacuum transport mechanism |