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Two port mems silicon flow control valve
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Two-stage fluid control valve having a first stage bi-stable two-port valve and a second stage microvalve
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Bi-stable two-port valve
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Heating, ventilating, air conditioning, and refrigeration system with simultaneous sub-cooling and superheat control
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Heating, ventilating, air conditioning, and refrigeration system with mass flow stabilization
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Method and structure for preventing solder flow into a MEMS pressure port during MEMS die attachment
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Multi-layer, stress-isolation platform for a MEMS die
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Method and structure of attachment layer for reducing stress transmission to attached MEMS die
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Open loop control system for a MEMS microvalve
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Method of maintaining the flow rate of a refrigerant while maintaining superheat
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Method for self-aligning solder-attached MEMS die to a mounting surface
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Metering device for a metered dose inhaler
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MEMS based solenoid valve
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Heat exchanger with expansion valve body formed on inlet header thereof
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Expansion valve
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Two-stage fluid control valve having a first stage mechanical valve and a second stage microvalve
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Test equipment arrangement having a superheat controller
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Method and Apparatus For Calibrating And Testing Multiple Superheat Controllers
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Low leak pilot operated spool valve
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Microvalve having contamination resistant features
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