| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Japan | 4 | |
| #2 | United States | 3 | |
| #3 | Canada | 2 | |
| #4 | EPO (European Patent Office) | 2 | |
| #5 | WIPO (World Intellectual Property Organization) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Engines, pumps and turbines | |
| #2 | Machines | |
| #3 | Semiconductors | |
| #4 | Surface technology and coating |
| # | Technology | |
|---|---|---|
| #1 | Non-positive-displacement pumps | |
| #2 | Pumps | |
| #3 | Unspecified technologies | |
| #4 | Unspecified technologies | |
| #5 | Semiconductor devices | |
| #6 | Coating metallic material |
| # | Name | Total Patents |
|---|---|---|
| #1 | Slabaugh Edward J | 8 |
| #2 | Edowaado Jiei Sureiboo | 4 |
| Publication | Filing date | Title |
|---|---|---|
| US4650064A | Substrate rotation method and apparatus | |
| EP0102787A1 | Cryogenic pump having maximum aperture throttled port | |
| US4531372A | Cryogenic pump having maximum aperture throttled part | |
| US4393896A | Radial vane gas throttling valve for vacuum systems |